Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C
نویسندگان
چکیده
منابع مشابه
TMAH/IPA anisotropic etching characteristics
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ژورنال
عنوان ژورنال: Micromachines
سال: 2020
ISSN: 2072-666X
DOI: 10.3390/mi11030253